Simulation of electric properties of MFIS capacitor with
BNT ferroelectric thin film using Silvaco/Atlas

ZHENGXue-jun(郑学军),ZHANGJun-jie(张俊杰),ZHOUYi-chun(周益春),TANGMing-hua(唐明华),YANGBo(杨 博),CHENYi-qiang(陈义强)

Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (Special 1) : 752-755.

Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (Special 1) : 752-755.
Nanomaterials, Thin Films and Coatings

Simulation of electric properties of MFIS capacitor with
BNT ferroelectric thin film using Silvaco/Atlas

  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 17(Special 1): 752-755

References

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}

Accesses

Citation

Detail

Sections
Recommended

/